顶点气体混合系统

精密使用燃气混合的完整解决方案

The Apex Gas Mixing System, powered by Veeco’s production-proven Piezocon® Gas Concentration Sensor, allows manufacturers to reduce production costs by purchasing lower-cost, higher-concentration gases, then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent. By using Piezocon to measure and control the mixture in real time, manufacturers eliminate the problems associated with constant flow mixers requiring wasted materials and constant scrubbing, furthering the already substantial cost savings. The stable output and precise control of gas concentration allows Apex to drive higher process tool up-time, eliminating the need to re-qualify after every gas cylinder change, reducing—and in some cases fully eliminating—system down-time due to routine cylinder changes. Apex drives real-time control, high precision and reproducibility and lowers cost of ownership for semiconductor manufacturers.

• 针对需要低浓度，高精度和成本敏感的气体混合物的应用进行了优化
• 与单个气瓶相比，通过10倍或更多的可重复性提高
• 通过消除短途旅行和重新资格来增加系统上涨，并降低测试时间
• 立即将气体购买成本降低多达60％
• 与现有安装的基础无缝集成，可用于各种应用，包括太阳能，半导体等
• 唯一使用Veeco压电的气体浓度传感器用于PPM级控制的唯一气体混合系统

为了实时控制，高精度和可重复性，以及较低的所有权成本，计算来自Veeco的顶点气体混合系统。